A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing - Mines Saint-Étienne
Conference Papers Year : 2008

A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing

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Operations Research [math.OC]

Stéphane Dauzère-Pérès  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01792345

Submitted on : Tuesday, May 15, 2018-1:34:31 PM

Last modification on : Tuesday, September 17, 2024-3:46:09 PM

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emse-01792345 , version 1 (15-05-2018)

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Claude Yugma, Stéphane Dauzère-Pérès, Alexandre Derreumaux, Olivier Sibille. A Batch Optimization Sofware for diffusion area scheduling in semiconductor manufacturing. 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2008, Cambridge, France. ⟨10.1109/ASMC.2008.4529063⟩. ⟨emse-01792345⟩

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