Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology

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https://hal-emse.ccsd.cnrs.fr/emse-01792352
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:37:59 PM
Last modification on : Monday, February 25, 2019 - 10:26:08 AM

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Nader Jedidi, Pascal Sallagoity, Agnès Roussy, Stéphane Dauzère-Pérès, Jacques Pinaton. Feed-forward run-to-run control for reduced parametric transistor variation in CMOS logic 0.13μm technology. 2007 International Symposium on Semiconductor Manufacturing, Oct 2007, Santa Clara, France. ⟨10.1109/ISSM.2007.4446831⟩. ⟨emse-01792352⟩

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