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Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition

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https://hal-emse.ccsd.cnrs.fr/emse-02499715
Contributor : Wei-Ting Yang <>
Submitted on : Thursday, March 5, 2020 - 2:40:19 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:28 PM

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Marco Reis, Jacques Pinaton. Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition. 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Apr 2018, Saratoga Springs, United States. pp.346-352, ⟨10.1109/ASMC.2018.8373161⟩. ⟨emse-02499715⟩

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