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Journal Articles Expert Systems with Applications Year : 2020

A physics-informed Run-to-Run control framework for semiconductor manufacturing

Wei-Ting Yang
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Jacques Pinaton
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emse-02703773 , version 1 (01-06-2020)

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Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis. A physics-informed Run-to-Run control framework for semiconductor manufacturing. Expert Systems with Applications, 2020, 155, pp.113424. ⟨10.1016/j.eswa.2020.113424⟩. ⟨emse-02703773⟩
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