Skip to Main content Skip to Navigation
Journal articles

A physics-informed Run-to-Run control framework for semiconductor manufacturing

Document type :
Journal articles
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-02703773
Contributor : Wei-Ting Yang <>
Submitted on : Monday, June 1, 2020 - 2:28:02 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:28 PM

Identifiers

Collections

Citation

Wei-Ting Yang, Jakey Blue, Agnès Roussy, Jacques Pinaton, Marco Reis. A physics-informed Run-to-Run control framework for semiconductor manufacturing. Expert Systems with Applications, Elsevier, 2020, 155, pp.113424. ⟨10.1016/j.eswa.2020.113424⟩. ⟨emse-02703773⟩

Share

Metrics

Record views

39