Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering - Mines Saint-Étienne
Conference Papers Year : 2019

Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering

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Operations Research [math.OC]

Stéphane Dauzère-Pérès  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-02873789

Submitted on : Thursday, June 18, 2020-3:20:39 PM

Last modification on : Tuesday, November 12, 2024-3:30:04 PM

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emse-02873789 , version 1 (18-06-2020)

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Etienne Le Quere, Stéphane Dauzère-Pérès, Stephane Astie, Cedric Maufront, Xavier Michallet, et al.. Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering. 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2019, Saratoga Springs, United States. pp.1-5, ⟨10.1109/ASMC.2019.8791790⟩. ⟨emse-02873789⟩

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EMSE PRES_CLERMONT CNRS SFL-ENSMSE LIMOS TDS-MACS CLERMONT-AUVERGNE-INP INSTITUT-MINES-TELECOM
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