Conference Papers
Year : 2023
Giulia Maslov : Connect in order to contact the contributor
https://hal-emse.ccsd.cnrs.fr/emse-04206364
Submitted on : Wednesday, September 13, 2023-3:57:27 PM
Last modification on : Tuesday, September 17, 2024-3:45:22 PM
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- HAL Id : emse-04206364 , version 1
- DOI : 10.1109/ASMC57536.2023.10121118
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Giulia Maslov, Claude Yugma, Philippe Vialletelle. Semantic modeling for smart manufacturing: towards a data alignment through knowledge formalization for semiconductor wafer fabrication. 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2023, Saratoga Springs, United States. pp.1-6, ⟨10.1109/ASMC57536.2023.10121118⟩. ⟨emse-04206364⟩
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