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Design and operation of automated material handling systems for IC wafer semiconductor manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-00712654
Contributor : Florent Breuil <>
Submitted on : Wednesday, June 27, 2012 - 4:13:58 PM
Last modification on : Wednesday, August 5, 2020 - 3:45:38 AM

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  • HAL Id : emse-00712654, version 1

Citation

Jairo R. Montoya-Torres, L. Vermarien, Jean−pierre Campagne, Hélène Marian. Design and operation of automated material handling systems for IC wafer semiconductor manufacturing. 2nd International Industrial Simulation Conference 2004 (ISC'2004), Jun 2004, Malaga, Spain. p. 175-179. ⟨emse-00712654⟩

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