Design and operation of automated material handling systems for IC wafer semiconductor manufacturing - Mines Saint-Étienne Access content directly
Conference Papers Year : 2004
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emse-00712654 , version 1 (27-06-2012)

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  • HAL Id : emse-00712654 , version 1

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Jairo R. Montoya-Torres, L. Vermarien, Jean−pierre Campagne, Hélène Marian. Design and operation of automated material handling systems for IC wafer semiconductor manufacturing. 2nd International Industrial Simulation Conference 2004 (ISC'2004), Jun 2004, Malaga, Spain. p. 175-179. ⟨emse-00712654⟩
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