Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing - Mines Saint-Étienne
Conference Papers Year : 2017

Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing

Hamideh Rostami
  • Function : Author
  • PersonId : 1021551
Département Sciences de la Fabrication et Logistique
Jakey Blue
  • Function : Author
  • PersonId : 2172
  • IdHAL : jakey-blue
Département Sciences de la Fabrication et Logistique
Claude Yugma
  • Function : Author
  • PersonId : 868326
Département Sciences de la Fabrication et Logistique

Domains

Artificial Intelligence [cs.AI] Databases [cs.DB] Signal and Image Processing

Hamideh Rostami  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-01621974

Submitted on : Monday, October 23, 2017-9:54:22 PM

Last modification on : Tuesday, September 17, 2024-3:45:20 PM

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emse-01621974 , version 1 (23-10-2017)

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  • HAL Id : emse-01621974 , version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing. European advanced process control and manufacturing (apc|m) Conference, Apr 2017, Dublin, Ireland. ⟨emse-01621974⟩

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