Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-01621974
Contributor : Hamideh Rostami <>
Submitted on : Monday, October 23, 2017 - 9:54:22 PM
Last modification on : Tuesday, October 23, 2018 - 2:36:10 PM

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  • HAL Id : emse-01621974, version 1

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Hamideh Rostami, Jakey Blue, Claude Yugma. Equipment Deterioration Prognosis and Fault Diagnosis in Semiconductor Manufacturing. European advanced process control and manufacturing (apc|m) Conference, Apr 2017, Dublin, Ireland. ⟨emse-01621974⟩

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