Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

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Communication dans un congrès
2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. IEEE, 〈10.1109/CoASE.2014.6899310〉
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https://hal-emse.ccsd.cnrs.fr/emse-01792294
Contributeur : Stéphane Dauzère-Pérès <>
Soumis le : mardi 15 mai 2018 - 13:01:43
Dernière modification le : vendredi 15 mars 2019 - 01:14:44

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Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. 2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. IEEE, 〈10.1109/CoASE.2014.6899310〉. 〈emse-01792294〉

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