Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook.
2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan.
⟨10.1109/CoASE.2014.6899310⟩.
⟨emse-01792294⟩