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Conference papers
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
Claude Yugma 1, 2
Author
Jakey Blue 1, 2
Mail :
Author IdHAL : jakey-blue
Stéphane Dauzère-Pérès 1, 2
Mail :
Author IdHAL : stephane-dauzere-peres
Philippe Vialletelle 3
Author
1
SFL-ENSMSE - Département Sciences de la Fabrication et Logistique (880, route de Mimet 13541 Gardanne - France)
- Mines Saint-Étienne MSE - École des Mines de Saint-Étienne (158, Cours Fauriel - 42023 Saint Étienne cedex 2 - France)
- IMT - Institut Mines-Télécom [Paris] (37-39 Rue Dareau, 75014 Paris - France)
- CMP-GC (France)
2
LIMOS - Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes (Bât ISIMA / Campus des Cézeaux BP 10025 / 63173 Aubière Cedex - France)
- Ecole Nationale Supérieure des Mines de St Etienne : UMR6158 (France)
- UCA - Université Clermont Auvergne : UMR6158 (49, bd François-Mitterrand / CS 60032 / 63001 Clermont-Ferrand Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR6158 (France)
3
ST-CROLLES - STMicroelectronics [Crolles] (850 rue Jean Monnet BP 16 38926 Crolles - France)
Document type :
Conference papers
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Complete list of metadatas
https://hal-emse.ccsd.cnrs.fr/emse-01792294
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:01:43 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:27 PM
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:01:43 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:27 PM
Identifiers
- HAL Id : emse-01792294, version 1
- DOI : 10.1109/CoASE.2014.6899310
Collections
EMSE | INSTITUT-TELECOM | SFL-ENSMSE | CNRS | LIMOS | PRES_CLERMONT
Citation
Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. 2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. ⟨10.1109/CoASE.2014.6899310⟩. ⟨emse-01792294⟩
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