Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

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Conference papers
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https://hal-emse.ccsd.cnrs.fr/emse-01792294
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:01:43 PM
Last modification on : Friday, March 15, 2019 - 1:14:44 AM

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Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. 2014 IEEE International Conference on Automation Science and Engineering (CASE), Aug 2014, Taipei, Taiwan. ⟨10.1109/CoASE.2014.6899310⟩. ⟨emse-01792294⟩

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