Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Claude Yugma; Jakey Blue; Stéphane Dauzère-Pérès; Philippe Vialletelle

doi:10.1109/CoASE.2014.6899310

Conference papers

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Claude Yugma ^{1, 2} Jakey Blue ^{1, 2} Stéphane Dauzère-Pérès ^{1, 2} Philippe Vialletelle ³

1 SFL-ENSMSE - Département Sciences de la Fabrication et Logistique

2 LIMOS - Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes

3 ST-CROLLES - STMicroelectronics [Crolles]

Document type :

Conference papers

Domain :

Computer Science [cs] / Operations Research [cs.RO]

Complete list of metadata

https://hal-emse.ccsd.cnrs.fr/emse-01792294
Contributor : Stéphane Dauzère-Pérès Connect in order to contact the contributor
Submitted on : Tuesday, May 15, 2018 - 1:01:43 PM
Last modification on : Sunday, June 26, 2022 - 9:36:08 AM

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

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Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

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