Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing

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https://hal-emse.ccsd.cnrs.fr/emse-01792321
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:19:50 PM
Last modification on : Monday, February 25, 2019 - 10:26:08 AM

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Gloria Luz Rodriguez Verjan, Stéphane Dauzère-Pérès, Jacques Pinaton. Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing. 2011 Winter Simulation Conference - (WSC 2011), Dec 2011, Phoenix, France. ⟨10.1109/WSC.2011.6147905⟩. ⟨emse-01792321⟩

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