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Conference Papers Year : 2011

Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing

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emse-01792321 , version 1 (15-05-2018)

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Gloria Luz Rodriguez Verjan, Stéphane Dauzère-Pérès, Jacques Pinaton. Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing. 2011 Winter Simulation Conference - (WSC 2011), Dec 2011, Phoenix, France. ⟨10.1109/WSC.2011.6147905⟩. ⟨emse-01792321⟩
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