Skip to Main content Skip to Navigation
Conference papers

Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing

Document type :
Conference papers
Complete list of metadatas

https://hal-emse.ccsd.cnrs.fr/emse-01792321
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Tuesday, May 15, 2018 - 1:19:50 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:21 PM

Identifiers

Collections

Citation

Gloria Luz Rodriguez Verjan, Stéphane Dauzère-Pérès, Jacques Pinaton. Impact of control plan design on tool risk management: A simulation study in semiconductor manufacturing. 2011 Winter Simulation Conference - (WSC 2011), Dec 2011, Phoenix, France. ⟨10.1109/WSC.2011.6147905⟩. ⟨emse-01792321⟩

Share

Metrics

Record views

161