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Impact of integrating equipment health in production scheduling for semiconductor fabrication

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https://hal-emse.ccsd.cnrs.fr/emse-01793390
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Wednesday, May 16, 2018 - 2:56:59 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:26 PM

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Yu-Ting Kao, Stéphane Dauzère-Pérès, Jakey Blue, Shi-Chung Chang. Impact of integrating equipment health in production scheduling for semiconductor fabrication. Computers and Industrial Engineering, Elsevier, 2018, 120, pp.450 - 459. ⟨10.1016/j.cie.2018.04.053⟩. ⟨emse-01793390⟩

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