Impact of integrating equipment health in production scheduling for semiconductor fabrication - Mines Saint-Étienne Access content directly
Journal Articles Computers & Industrial Engineering Year : 2018
No file

Dates and versions

emse-01793390 , version 1 (16-05-2018)

Identifiers

Cite

Yu-Ting Kao, Stéphane Dauzère-Pérès, Jakey Blue, Shi-Chung Chang. Impact of integrating equipment health in production scheduling for semiconductor fabrication. Computers & Industrial Engineering, 2018, 120, pp.450 - 459. ⟨10.1016/j.cie.2018.04.053⟩. ⟨emse-01793390⟩
53 View
0 Download

Altmetric

Share

Gmail Mastodon Facebook X LinkedIn More