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Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering

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https://hal-emse.ccsd.cnrs.fr/emse-02873789
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Thursday, June 18, 2020 - 3:20:39 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:28 PM

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Etienne Le Quere, Stéphane Dauzère-Pérès, Stephane Astie, Cedric Maufront, Xavier Michallet, et al.. Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering. 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2019, Saratoga Springs, United States. pp.1-5, ⟨10.1109/ASMC.2019.8791790⟩. ⟨emse-02873789⟩

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