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Conference papers
Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering
Etienne Le Quere
1, 2, 3
Stéphane Dauzère-Pérès
1, 2
Stephane Astie
3
Cedric Maufront
3
Xavier Michallet
3
Guillaume Bugnon
3
Nicolas Ferrandini
3
Etienne Le Quere 1, 2, 3
Author
Stéphane Dauzère-Pérès 1, 2
Mail :
Author IdHAL : stephane-dauzere-peres
Stephane Astie 3
Author
Cedric Maufront 3
Author
1
SFL-ENSMSE - Département Sciences de la Fabrication et Logistique (880, route de Mimet 13541 Gardanne - France)
- Mines Saint-Étienne MSE - École des Mines de Saint-Étienne (158, Cours Fauriel - 42023 Saint Étienne cedex 2 - France)
- IMT - Institut Mines-Télécom [Paris] (37-39 Rue Dareau, 75014 Paris - France)
- CMP-GC (France)
2
LIMOS - Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes (Bât ISIMA / Campus des Cézeaux BP 10025 / 63173 Aubière Cedex - France)
- Ecole Nationale Supérieure des Mines de St Etienne : UMR6158 (France)
- UCA - Université Clermont Auvergne : UMR6158 (49, bd François-Mitterrand / CS 60032 / 63001 Clermont-Ferrand Cedex 1 - France)
- CNRS - Centre National de la Recherche Scientifique : UMR6158 (France)
Document type :
Conference papers
Domain :
Complete list of metadatas
https://hal-emse.ccsd.cnrs.fr/emse-02873789
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Thursday, June 18, 2020 - 3:20:39 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:28 PM
Contributor : Stéphane Dauzère-Pérès <>
Submitted on : Thursday, June 18, 2020 - 3:20:39 PM
Last modification on : Wednesday, June 24, 2020 - 4:19:28 PM
Identifiers
- HAL Id : emse-02873789, version 1
- DOI : 10.1109/ASMC.2019.8791790
Collections
EMSE | LIMOS | CNRS | PRES_CLERMONT | INSTITUT-TELECOM | SFL-ENSMSE
Citation
Etienne Le Quere, Stéphane Dauzère-Pérès, Stephane Astie, Cedric Maufront, Xavier Michallet, et al.. Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering. 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2019, Saratoga Springs, United States. pp.1-5, ⟨10.1109/ASMC.2019.8791790⟩. ⟨emse-02873789⟩
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