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Conference Papers Year : 2023

Semantic modeling for smart manufacturing: towards a data alignment through knowledge formalization for semiconductor wafer fabrication

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Computation and Language [cs.CL]

Giulia Maslov  : Connect in order to contact the contributor

https://hal-emse.ccsd.cnrs.fr/emse-04206364

Submitted on : Wednesday, September 13, 2023-3:57:27 PM

Last modification on : Tuesday, September 19, 2023-3:04:10 AM

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emse-04206364 , version 1 (13-09-2023)

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Giulia Maslov, Claude Yugma, Philippe Vialletelle. Semantic modeling for smart manufacturing: towards a data alignment through knowledge formalization for semiconductor wafer fabrication. 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2023, Saratoga Springs, United States. pp.1-6, ⟨10.1109/ASMC57536.2023.10121118⟩. ⟨emse-04206364⟩

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